Onto Innovation shares owned by Massachusetts Financial Services
Quarter-by-quarter ownership of Onto Innovation (ONTO) shares owned by Massachusetts Financial Services
from 13F filings
Historical chart of Massachusetts Financial Services investment in Onto Innovation
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Quarterly reported holdings in Onto Innovation by Massachusetts Financial Services
| Quarter filed | Position value | Share count | Share price at filing |
|---|---|---|---|
| 2025-09-30 | $13M | 102k | 129.22 |
| 2025-06-30 | $45M | 442k | 100.93 |
| 2025-03-31 | $157M | 1.3M | 121.34 |
| 2024-12-31 | $145M | 870k | 166.67 |
| 2024-09-30 | $105M | 505k | 207.56 |
| 2024-06-30 | $188M | 857k | 219.56 |
| 2024-03-31 | $121M | 667k | 181.08 |
| 2023-12-31 | $62M | 405k | 152.90 |
| 2023-09-30 | $35M | 272k | 127.52 |
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